The design and fabrication of an optical fiber MEMS pressure sensor

Yixian Ge; Ming Wang; Hua Rong; Xuxing Chen

doi:10.1117/12.726498

5 March 2007 The design and fabrication of an optical fiber MEMS pressure sensor

Yixian Ge, Ming Wang, Hua Rong, Xuxing Chen

Proceedings Volume 6595, Fundamental Problems of Optoelectronics and Microelectronics III; 659541 (2007) https://doi.org/10.1117/12.726498
Event: Fundamental Problems of Optoelectronics and Microelectronics III, 2006, Harbin, China

Abstract

A novel pressure sensor based on Fabry-Perot interferometry and micro-electromechanical system (MEMS) technology is proposed and demonstrated. Basic micro-electromechanical technique has been used to fabricate the pressure sensor. Fabrication process and packaging configuration are proposed. The loaded pressure is gauged by measuring the spectrum shift of the reflected optical signal. The experimental results show that high linear response in the range of 0.2-1.0 Mpa and a reasonable sensitivity of 10.07 nm/MPa (spectrum shift/pressure) have been obtained for this sensor.

Citation Download Citation

Yixian Ge, Ming Wang, Hua Rong, and Xuxing Chen "The design and fabrication of an optical fiber MEMS pressure sensor", Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659541 (5 March 2007); https://doi.org/10.1117/12.726498

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