Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators

C. Serre; A. Pérez-Rodríguez; N. Fondevilla; E. Martincic; J. R. Morante; J. Montserrat; J. Esteve

doi:10.1117/12.722275

15 May 2007 Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators

C. Serre, A. Pérez-Rodríguez, N. Fondevilla, E. Martincic, J. R. Morante, J. Montserrat, J. Esteve

Proceedings Volume 6589, Smart Sensors, Actuators, and MEMS III; 658905 (2007) https://doi.org/10.1117/12.722275
Event: Microtechnologies for the New Millennium, 2007, Maspalomas, Gran Canaria, Spain

Abstract

This work describes the design and implementation of a resonator structure for the fabrication of an electromagnetic inertial microgenerator for energy scavenging from ambient vibrations. This structure is based in the use of a permanent magnet (inertial mass) mounted onto a polymeric membrane. ANSYS simulations are carried out to investigate the influence of the membrane geometry on the resonant frequency. Moreover, generator prototypes have been fabricated with a modular manufacturing process in which the electromagnetic converter and the mechanical resonator are manufactured separately, diced and then assembled. In these prototypes, the influence of the resonator geometry (membrane dimensions) on the generator behaviour has been investigated. The experimental results show the ability of these devices to generate power levels in the range of μW's and output voltages in the range of hundreds of mV. The parasitic damping of the resonator structures is estimated from the fitting of the experimental data, and suggests the existence of an intrinsic limitation of the polymers related to spring stiffening effects at large excitation amplitudes.

Citation Download Citation

C. Serre, A. Pérez-Rodríguez, N. Fondevilla, E. Martincic, J. R. Morante, J. Montserrat, and J. Esteve "Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators", Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 658905 (15 May 2007); https://doi.org/10.1117/12.722275

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