Paper
14 May 2007 17 &mgr;m pixel 640 x 480 microbolometer FPA development at BAE Systems
Richard J. Blackwell, Tuyet Bach, Dan O'Donnell, Jeannie Geneczko, Michael Joswick
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Abstract
BAE Systems has developed an advanced 640 x 480 focal plane array (FPA) with a 17 &mgr;m pixel pitch. Sensitivity of ≤ 50 mK was demonstrated and the FPAs were used in imaging demonstrations. Successful scaling of BAE Systems' patented single contact per pixel, single-level microbolometer process to 17 &mgr;m pitch provides a path toward next generation microbolometer imaging systems.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Richard J. Blackwell, Tuyet Bach, Dan O'Donnell, Jeannie Geneczko, and Michael Joswick "17 &mgr;m pixel 640 x 480 microbolometer FPA development at BAE Systems", Proc. SPIE 6542, Infrared Technology and Applications XXXIII, 65421U (14 May 2007); https://doi.org/10.1117/12.723474
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CITATIONS
Cited by 16 scholarly publications.
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KEYWORDS
Imaging systems

Staring arrays

Microbolometers

Readout integrated circuits

CMOS technology

Thermography

Electronics

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