An approach to modeling and on-line identification for piezoelectric stack actuator

Yueyu Wang D.D.S.; Xuezeng Zhao; Wei Chu

doi:10.1117/12.711851

5 April 2007 An approach to modeling and on-line identification for piezoelectric stack actuator

Yueyu Wang D.D.S., Xuezeng Zhao, Wei Chu

Proceedings Volume 6518, Metrology, Inspection, and Process Control for Microlithography XXI; 65184J (2007) https://doi.org/10.1117/12.711851
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

The piezoelectric stack actuator used in Scanning Probe Microscopes (SPMs) always exhibits significant hysteresis and creep. The hysteresis and creep will reduce the positioning precision and produce the distortion in scanning images. Therefore it is necessary to develop a model with sufficient accuracy and stability to characterize the nonlinearities of the piezoelectric stack actuator. In this paper, a novel hysteresis and creep model and a method for on-line identifying parameters of this model are proposed. Experiment result shows that, actuated by triangular-wave voltage, the predicting error using the proposed model is less than 2%, which is reduced by an order of magnitude comparing with the error directly predicted using input voltage. The validity of this method is demonstrated by experiment result.

Citation Download Citation

Yueyu Wang D.D.S., Xuezeng Zhao, and Wei Chu "An approach to modeling and on-line identification for piezoelectric stack actuator", Proc. SPIE 6518, Metrology, Inspection, and Process Control for Microlithography XXI, 65184J (5 April 2007); https://doi.org/10.1117/12.711851

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available