Spectrally investigated optimization for high optical transmission of the C-shaped nano apertures

Eungman Lee; Kyoungsik Kim; Jae W. Hahn

doi:10.1117/12.712518

21 March 2007 Spectrally investigated optimization for high optical transmission of the C-shaped nano apertures

Eungman Lee, Kyoungsik Kim, Jae W. Hahn

Proceedings Volume 6517, Emerging Lithographic Technologies XI; 651721 (2007) https://doi.org/10.1117/12.712518
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Due to the maturity of current laser technology, the limitation of empirical wavelengths of lasers useful for optical microlithography makes spectrally investigated optimization very important for the design of C-shaped nano apertures; in order to achieve high optical transmission as well as tight focusing, the resonant transmission of nano apertures depends on the incident light's wavelength. The optically propagating transmission through the nano aperture, determined by the effects of the propagating field and evanescent field, is also important in order to achieve deep patterning. High power throughput and decaying behaviors of propagating light through nano apertures depend on their resonance condition which is affected by geometric parameters and material properties as well as the wavelength of incident light. In this report, we analyze the spectral properties of resonant transmission of light through a C-shaped nano aperture in a metal film using a finite-difference time-domain (FDTD) simulation. These simulations may be helpful for the design of C-shaped nano apertures for high power throughput with tight focusing. Furthermore, we show that power dissipation of propagating light through the C-shaped nano aperture depends on metals.

Citation Download Citation

Eungman Lee, Kyoungsik Kim, and Jae W. Hahn "Spectrally investigated optimization for high optical transmission of the C-shaped nano apertures", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 651721 (21 March 2007); https://doi.org/10.1117/12.712518

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Metals

Near field

Aluminum

Silver

Near field optics

Finite-difference time-domain method

Transmittance

Show All Keywords

Keywords/Phrases

Search In:

Publication Years