Paper
20 February 2007 State-of-the-art ZnO bulk crystal growth
T. Fukuda, Y. Mikawa, D. Ehrentraut
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Abstract
Zinc oxide (ZnO) crystals can be grown by vapor phase transport, hydrothermal solution growth, and high pressure melt growth. Three inch size single crystal has been demonstrated by the hydrothermal growth technique. We will emphasis on the hydrothermal technology of large size ZnO crystal. Material characteristics are discussed and compared to ZnO fabricated from vapor phase and melt growth. A route to obtain high-quality, single-crystalline ZnO films with mechanically untouched surfaces is employed to screen the doping of ZnO under the conditions of growth near the thermodynamic equilibrium. Future trends in ZnO crystal growth technology will be discussed.
© (2007) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Fukuda, Y. Mikawa, and D. Ehrentraut "State-of-the-art ZnO bulk crystal growth", Proc. SPIE 6474, Zinc Oxide Materials and Devices II, 647412 (20 February 2007); https://doi.org/10.1117/12.714019
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Cited by 5 scholarly publications.
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KEYWORDS
Zinc oxide

Crystals

Semiconducting wafers

Lithium

Doping

Liquid phase epitaxy

Aluminum

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