White light interferometric profile measurement system using spectral coherence

Gao-Wei Chang; Yu-Hsuan Lin; Zong-Mu Yeh

doi:10.1117/12.700003

19 January 2007 White light interferometric profile measurement system using spectral coherence

Gao-Wei Chang, Yu-Hsuan Lin, Zong-Mu Yeh

Proceedings Volume 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI; 64630I (2007) https://doi.org/10.1117/12.700003
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

It is well known that white light interferometry (WLI) is important to nano-scale 3-D profile measurement technology. To archive cost-effective and accurate measurements, the researches for WLI are widely spreading. Our objective is to build up a 3-D micro-structure profile measurement system based on WLI, for micro-mechatronic, micro-optical, and semi-conductor devices. This paper briefly reviews related WLI theory and then the principle of spectral coherence is employed to improve the system design. Specifically, proper spectral filters can be used to extend the coherence length of the light source to the order of several ten micrometers. That is, the coherence length of the filtered light source is longer than that of the original source. In this paper, Michelson interference experiments are conducted with filtered and unfiltered white light sources, to show the feasibility of the concept of spectral coherence. The Michelson interferometer is adopted due to its convenience of optical installation and its acceptable tolerance to noise. The experiment results indicate that our approach is feasible and thus it can improve the WLI measurement performance.

Citation Download Citation

Gao-Wei Chang, Yu-Hsuan Lin, and Zong-Mu Yeh "White light interferometric profile measurement system using spectral coherence", Proc. SPIE 6463, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI, 64630I (19 January 2007); https://doi.org/10.1117/12.700003

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