Optimal actuation of microcantilevers by a laser beam

Sagnik Pal; Anjan K. Ghosh

doi:10.1117/12.685947

19 October 2006 Optimal actuation of microcantilevers by a laser beam

Sagnik Pal, Anjan K. Ghosh

Proceedings Volume 6374, Optomechatronic Actuators, Manipulation, and Systems Control; 63740O (2006) https://doi.org/10.1117/12.685947
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

Singly-clamped micron-sized cantilevers actuated by optical radiation pressure exerted by a laser are analyzed. An expression for optimum point of actuation giving the maximum amount of deflection is obtained.

Citation Download Citation

Sagnik Pal and Anjan K. Ghosh "Optimal actuation of microcantilevers by a laser beam", Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 63740O (19 October 2006); https://doi.org/10.1117/12.685947

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