Paper
6 October 2006 Performance analysis of low-cost uncooled microbolometer infrared detectors
Author Affiliations +
Proceedings Volume 6352, Optoelectronic Materials and Devices; 63523D (2006) https://doi.org/10.1117/12.688521
Event: Asia-Pacific Optical Communications, 2006, Gwangju, South Korea
Abstract
Uncooled microbolometer infrared detectors are being developed for a wide range of thermal imaging applications. To design and manufacture high-performance microbolometer infrared detectors, numerical calculation and simulation is necessary. In this work, finite element methods are performed to simulate the transient temperature field of thermistor films of microbolometer infrared detectors. The varisized supporting legs' impacts on the performance of detectors are discussed. At the same time, variation of the bias voltage and the substrate temperature's impacts on total noise, noise equivalent to temperature difference (NETD) and detectivity (D*) are also discussed in details. These performance analyses are helpful for optimum design of microbolometer infrared detectors' structure and rational choice of working temperature of infrared focal plane arrays.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Junju Zhang, Lianjun Sun, Shiyun Wang, Benkang Chang, Yunsheng Qian, and Chunyu Yu "Performance analysis of low-cost uncooled microbolometer infrared detectors", Proc. SPIE 6352, Optoelectronic Materials and Devices, 63523D (6 October 2006); https://doi.org/10.1117/12.688521
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Sensors

Microbolometers

Infrared detectors

Infrared sensors

Finite element methods

Sensor performance

Thermography

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