Advanced femtosecond DUV laser mask repair tool for large area photomasks

Leon Treyger; Jon Heyl; Michael Fink; Iztok Koren; Yonggang Li; Donald Ronning; Farrell Small; Bin Xian

doi:10.1117/12.686505

20 October 2006 Advanced femtosecond DUV laser mask repair tool for large area photomasks

Leon Treyger, Jon Heyl, Michael Fink, Iztok Koren, Yonggang Li, Donald Ronning, Farrell Small, Bin Xian

Proceedings Volume 6349, Photomask Technology 2006; 63494G (2006) https://doi.org/10.1117/12.686505
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

In this paper we report for the first time on the development and performance of commercially available large area photomask repair tools of the MRT series. MRT+1500 / MRT+2000 are advanced laser-based tools specifically designed to repair high quality FPD (LCD & PDP) binary photomasks of Generations 6, 7, and beyond. MRT+2000 is the world's first commercial tool capable of handling and repairing Gen 7 photomasks with sizes up to two meters. Another unique feature of these tools is that they use a single DUV femtosecond laser to repair both opaque and clear defects with submicron laser spot size while a proprietary gantry motion system supports nanometer-scale accuracy and stability for edge lock. Key tool specifications, system architecture, design parameters, and laser processing specifics are discussed.

Citation Download Citation

Leon Treyger, Jon Heyl, Michael Fink, Iztok Koren, Yonggang Li, Donald Ronning, Farrell Small, and Bin Xian "Advanced femtosecond DUV laser mask repair tool for large area photomasks", Proc. SPIE 6349, Photomask Technology 2006, 63494G (20 October 2006); https://doi.org/10.1117/12.686505

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