Introduction of a die-to-database verification tool for mask geometry NGR4000

Michael J. Hoffman; Tadashi Kitamura; Kazufumi Kubota; Toshiaki Hasebe; Shinichi Nakazawa; Toshifumi Tokumoto; Masatoshi Tsuneoka; Masahiro Yamamoto; Masahiro Inoue

doi:10.1117/12.684984

20 October 2006 Introduction of a die-to-database verification tool for mask geometry NGR4000

Michael J. Hoffman, Tadashi Kitamura, Kazufumi Kubota, Toshiaki Hasebe, Shinichi Nakazawa, Toshifumi Tokumoto, Masatoshi Tsuneoka, Masahiro Yamamoto, Masahiro Inoue

Author Affiliations +

Proceedings Volume 6349, Photomask Technology 2006; 634940 (2006) https://doi.org/10.1117/12.684984
Event: SPIE Photomask Technology, 2006, Monterey, California, United States

Abstract

The NGR4000 enables high precision verification of mask features, by matching Scanning Electron Microscope (SEM) images of the mask features to their intended mask design data. The system detects defects in Critical Dimensions (CDs) and feature placement relative to the large Field of View (FOV). This tool is optimized to determine pattern fidelity and perform CD measurements with repeatability well ahead of ITRS roadmap requirements. This paper will show examples and describe the advantages of mass CD measurements, and relative feature placement accuracy as new technique to define pattern fidelity.

Citation Download Citation

Michael J. Hoffman, Tadashi Kitamura, Kazufumi Kubota, Toshiaki Hasebe, Shinichi Nakazawa, Toshifumi Tokumoto, Masatoshi Tsuneoka, Masahiro Yamamoto, and Masahiro Inoue "Introduction of a die-to-database verification tool for mask geometry NGR4000", Proc. SPIE 6349, Photomask Technology 2006, 634940 (20 October 2006); https://doi.org/10.1117/12.684984

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available