Laser plasmatron for CVD synthesis of diamond in open air

V. G. Naumov; V. E. Cherkovetch; V. U. Dubrovckii; F. K. Kosyrev; V. G. Vostrikov; V. I. Konov; A. P. Bolshakov; V. G. Ral'chenko

doi:10.1117/12.694418

10 June 2006 Laser plasmatron for CVD synthesis of diamond in open air

V. G. Naumov, V. E. Cherkovetch, V. U. Dubrovckii, F. K. Kosyrev, V. G. Vostrikov, V. I. Konov, A. P. Bolshakov, V. G. Ral'chenko

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Proceedings Volume 6344, Advanced Laser Technologies 2005; 63441N (2006) https://doi.org/10.1117/12.694418
Event: Advanced Laser Technologies 2005, 2005, Tianjin, China

Abstract

Laser plasma technique for CVD synthesis of diamond in open air that dos not demand a vacuum or reaction chamber has been developed. Laser plasmatron, based on 3 kW cw CO₂ laser and presented in this work, was used for CVD of diamond films on tungsten and molybdenum substrates with deposition area of about 3 - 4 times larger then plasma jet cross-section. Different modes of laser plasmatron operation with substrate movement relative to plasma core are considered. Possible directions of further investigation of laser-induced plasma CVD of diamond on large area are discussed.

Citation Download Citation

V. G. Naumov, V. E. Cherkovetch, V. U. Dubrovckii, F. K. Kosyrev, V. G. Vostrikov, V. I. Konov, A. P. Bolshakov, and V. G. Ral'chenko "Laser plasmatron for CVD synthesis of diamond in open air", Proc. SPIE 6344, Advanced Laser Technologies 2005, 63441N (10 June 2006); https://doi.org/10.1117/12.694418

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