Compact x-ray microscopes for EUV- and soft x-radiation with spectral imaging capabilities

David Schäfer; Thomas Nisius; Rolf Früke; Stefan Rausch; Marek Wieland; Uli Vogt; Thomas Wilhein

doi:10.1117/12.679819

29 August 2006 Compact x-ray microscopes for EUV- and soft x-radiation with spectral imaging capabilities

David Schäfer, Thomas Nisius, Rolf Früke, Stefan Rausch, Marek Wieland, Uli Vogt, Thomas Wilhein

Proceedings Volume 6317, Advances in X-Ray/EUV Optics, Components, and Applications; 631704 (2006) https://doi.org/10.1117/12.679819
Event: SPIE Optics + Photonics, 2006, San Diego, California, United States

Abstract

We report on a compact full-field transmission microscope (CTXM) and a scanning transmission microscope (CSTXM) developed for imaging at laboratory scale X-ray sources. The microscopes are based on zone plates for imaging in the EUV and water window region (wavelength 2.3 nm to 4.4 nm). The radiation for the full-field microscope is generated by focusing short laser pulses with an energy of 100 mJ on a 20 μm cryogenic liquid nitrogen jet. A condenser zone plate in conjunction with an aperture is used to provide monochromatic sample illumination. This allows for easy wavelength selection within the N₂-Emission spectrum. Thus, the presented setup offers the possibility of spectral imaging. A micro zone plate generates a magnified image detected by a back illuminated TE-cooled CCD camera (1,340 x 1,300 pixel). The actual configuration provides magnifications up to 1,000x at exposure times in a range of a few ten minutes with sub-100 nm resolution. Our compact scanning microscope (CSTXM) operates with a zone plate, focusing the radiation onto a sample which is placed on a piezo driven xy-stage with 1 nm lateral resolution. Using high-harmonic radiation at 13 nm wavelength sub-micron resolution is achieved. With light at 17 nm wavelength originating from the O-VI emission line of a laser plasma source based on an ethanol jet, 500 nm structures were imaged in less than 20 minutes resulting in an 100 x 40 pixel image.

Citation Download Citation

David Schäfer, Thomas Nisius, Rolf Früke, Stefan Rausch, Marek Wieland, Uli Vogt, and Thomas Wilhein "Compact x-ray microscopes for EUV- and soft x-radiation with spectral imaging capabilities", Proc. SPIE 6317, Advances in X-Ray/EUV Optics, Components, and Applications, 631704 (29 August 2006); https://doi.org/10.1117/12.679819

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