A subpixel edge detection algorithm for the high precision automatic alignment system

Yuning Zhong; Qinghua Lv; Liangen Yang; Yingwu Xue

doi:10.1117/12.716300

13 October 2006 A subpixel edge detection algorithm for the high precision automatic alignment system

Yuning Zhong, Qinghua Lv, Liangen Yang, Yingwu Xue

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62802T (2006) https://doi.org/10.1117/12.716300
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

A new sub-pixel edge detection algorithm has been presented in this paper, which can be used in some high precision automatic alignment systems, such as automatic industrial measurement systems; integrate circuit encapsulation systems, micro-electromechanical systems, micro-optical electromechanical systems, three-dimensional encapsulation systems and so on. This algorithm uses the spatial moment to detect the location of edge within sub-pixel resolutions, and gains an advantage over the traditional pixel edge detection algorithms. Moreover, an extraction technology of region of interest is applied to reduce the time of analysis after rough pose estimation.

Citation Download Citation

Yuning Zhong, Qinghua Lv, Liangen Yang, and Yingwu Xue "A subpixel edge detection algorithm for the high precision automatic alignment system", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62802T (13 October 2006); https://doi.org/10.1117/12.716300

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