Surface roughness parameters measurements by digital holographic microscopy (DHM)

Frédéric Montfort; Yves Emery; Eduardo Solanas; Etienne Cuche; Nicolas Aspert; Pierre Marquet; Claude Joris; Jonas Kühn; Christian Depeursing

doi:10.1117/12.716113

13 October 2006 Surface roughness parameters measurements by digital holographic microscopy (DHM)

Frédéric Montfort, Yves Emery, Eduardo Solanas, Etienne Cuche, Nicolas Aspert, Pierre Marquet, Claude Joris, Jonas Kühn, Christian Depeursing

Author Affiliations +

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 62800V (2006) https://doi.org/10.1117/12.716113
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

Digital Holographic Microscopes (DHM) allows the capture of all the information necessary to provide 3D phase measurements with a nanometer vertical resolution in a single image acquisition. DHM images provide measurements of the surface topography which can be used for surface analysis, roughness measurements for example. In this paper we present roughness measurements on micro-balls of different sizes for which numerical procedures are applied for form factor and waviness removal. DHM thus permits quantitative measurements of the roughness on a 2 dimensional area allowing enlarged information compared to common profilometers. Mean roughness of 5 to 30 nm are measured and compared to values obtained by a profilometer.

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Frédéric Montfort, Yves Emery, Eduardo Solanas, Etienne Cuche, Nicolas Aspert, Pierre Marquet, Claude Joris, Jonas Kühn, and Christian Depeursing "Surface roughness parameters measurements by digital holographic microscopy (DHM)", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 62800V (13 October 2006); https://doi.org/10.1117/12.716113

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