Miniaturized InSb photovoltaic infrared sensor operating at room temperature

E. G. Camargo; N. Kuze; K. Ueno; Y. Kawakami; Y. Moriyasu; K. Nagase; M. Sato; H. Endo; K. Ishibashi; M. Ozaki

doi:10.1117/12.663162

22 April 2006 Miniaturized InSb photovoltaic infrared sensor operating at room temperature

E. G. Camargo, N. Kuze, K. Ueno, Y. Kawakami, Y. Moriyasu, K. Nagase, M. Sato, H. Endo, K. Ishibashi, M. Ozaki

Proceedings Volume 6189, Optical Sensing II; 61890Z (2006) https://doi.org/10.1117/12.663162
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

This paper reports the development of a novel InSb photovoltaic infrared sensor (InSb PVS) operating at room temperature. The InSb PVS consists of an InSb p⁺/p^-/n⁺ structure grown on semi-insulating GaAs (100) substrate, with a p⁺ Al_0.17In_0.83Sb barrier layer between p⁺ and p^- layers to reduce diffusion of photo-excited electrons. Photodiodes were fabricated by wet etching process and, using a 500K blackbody, we obtained D* of 2.8x10⁸ cmHz^1/2/W and R_V of 1.9 kV/W at room temperature. S/N was improved with the serial connection of 700 photodiodes patterned on a 600x600 μm² chip. Increasing the number (N) of connected photodiodes, S/N ratio was improved by a factor of N^1/2. RV was constant for signals ranging from DC to 500Hz. From spectral response measurements a cut-off wavelength of 6.8 μm was obtained. The InSb PVS was flip-chip bonded on a pre-amplifier IC, allowing the shortest connection between the InSb PVS and the pre-amplifier, making the system immune to electromagnetic noise. The system was finally encapsulated by a Dual Flat Non-leaded (DFN) package with a window, which exposes the backside of the GaAs substrate allowing the infrared light incidence. The device external sizes are 2.2 mm x 2.7 mm x 0.7 mm and to our knowledge is the smallest uncooled sensor for the middle-infrared range reported until now.

Citation Download Citation

E. G. Camargo, N. Kuze, K. Ueno, Y. Kawakami, Y. Moriyasu, K. Nagase, M. Sato, H. Endo, K. Ishibashi, and M. Ozaki "Miniaturized InSb photovoltaic infrared sensor operating at room temperature", Proc. SPIE 6189, Optical Sensing II, 61890Z (22 April 2006); https://doi.org/10.1117/12.663162

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