Optical probing of nano-electromechanical systems (NEMS)

K. L. Ekinci; D. Karabacak; T. Kouh; D. H. Kim

doi:10.1117/12.665299

21 April 2006 Optical probing of nano-electromechanical systems (NEMS)

K. L. Ekinci, D. Karabacak, T. Kouh, D. H. Kim

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 61860M (2006) https://doi.org/10.1117/12.665299
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Optical techniques are finding more and more use in the domain of nanoelectromechanical systems (NEMS). In particular, Michelson interferometry and Fabry-Perot interferometry have been employed to transduce high frequency motion of NEMS resonators. Here, we review our recent accomplishments in optical probing of NEMS. We discuss the effectiveness of the above-mentioned optical techniques as the relevant NEMS dimensions are reduced beyond the optical probing wavelength.

Citation Download Citation

K. L. Ekinci, D. Karabacak, T. Kouh, and D. H. Kim "Optical probing of nano-electromechanical systems (NEMS)", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860M (21 April 2006); https://doi.org/10.1117/12.665299

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