Experimental validation and testing of components for active damping control for micromachined mechanical vibration isolation filters using electrostatic actuation

Robert Dean; George Flowers; Nicole Sanders; Roland Horvath; Wayne Johnson; Michael Kranz; Michael Whitley

doi:10.1117/12.658091

31 March 2006 Experimental validation and testing of components for active damping control for micromachined mechanical vibration isolation filters using electrostatic actuation

Robert Dean, George Flowers, Nicole Sanders, Roland Horvath, Wayne Johnson, Michael Kranz, Michael Whitley

Author Affiliations +

Proceedings Volume 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; 61721C (2006) https://doi.org/10.1117/12.658091
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2006, San Diego, California, United States

Abstract

Missiles, rockets and certain types of industrial machinery are exposed extreme vibration environments, with high frequency/amplitude mechanical vibrations which may be detrimental to components that are sensitive to these high frequency mechanical vibrations, such as MEMS gyroscopes and resonators, oscillators and some micro optics. Exposure to high frequency mechanical vibrations can lead to a variety of problems, from reduced sensitivity and an increased noise floor to the outright mechanical failure of the device. One approach to mitigate such effects is to package the sensitive device on a micromachined vibration isolator tuned to the frequency range of concern. In this regard, passive micromachined silicon lowpass filter structures (spring-mass-damper) have been developed and demonstrated. However, low damping (especially if operated in near-vacuum environments) and a lack of tunability after fabrication has limited the effectiveness and general applicability of such systems. Through the integration of a electrostatic actuator, a relative velocity sensor and the passive filter structure, an active micromachined mechanical lowpass vibration isolation filter can be realized where the damping and resonant frequency can be tuned. This paper presents the development and validation of a key component of the micromachined active filter, a sensor for measuring the relative velocity between micromachined structures.

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Robert Dean, George Flowers, Nicole Sanders, Roland Horvath, Wayne Johnson, Michael Kranz, and Michael Whitley "Experimental validation and testing of components for active damping control for micromachined mechanical vibration isolation filters using electrostatic actuation", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 61721C (31 March 2006); https://doi.org/10.1117/12.658091

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KEYWORDS

Electrodes

Actuators

Sensors

Capacitors

Vibration isolation

Filtering (signal processing)

Microelectromechanical systems

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