Nickel electrodeposition studies for high-aspect-ratio microstructure fabrication for MEMS

Tinghui Xin; Pratul K. Ajmera

doi:10.1117/12.659104

31 March 2006 Nickel electrodeposition studies for high-aspect-ratio microstructure fabrication for MEMS

Tinghui Xin, Pratul K. Ajmera

Proceedings Volume 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; 61720E (2006) https://doi.org/10.1117/12.659104
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2006, San Diego, California, United States

Abstract

This work investigates both DC and pulse electroplating techniques for nickel. A nickel sulfamate electrolyte is utilized for nickel deposition over Cu/Ti coated silicon substrates. Stress levels and grain morphology are investigated and analyzed for the electroplated nickel deposit. A comparison is also made between the results obtained from DC and from long and short duration pulse electroplating techniques. Both compressive and tensile built-in stresses are observed in both DC and long duration pulse plated nickel while only compressive stresses are observed in short duration pulse plated nickel.

Citation Download Citation

Tinghui Xin and Pratul K. Ajmera "Nickel electrodeposition studies for high-aspect-ratio microstructure fabrication for MEMS", Proc. SPIE 6172, Smart Structures and Materials 2006: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, 61720E (31 March 2006); https://doi.org/10.1117/12.659104

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available