Laser-induced generation of shaped holes by variable beam shaping

Andreas Stephen; Simeon Metev; Werner Jüptner; Frank Vollertsen

doi:10.1117/12.661207

9 December 2005 Laser-induced generation of shaped holes by variable beam shaping

Andreas Stephen, Simeon Metev, Werner Jüptner, Frank Vollertsen

Proceedings Volume 6157, Workshop on Laser Applications in Europe; 61570I (2005) https://doi.org/10.1117/12.661207
Event: EPIC/SPIE Workshop on laser applications in Europe, 2005, Dresden, Germany

Abstract

In this paper we report on a new method for the generation of shaped holes by dynamical variation of the beam shape with a special optical system. It is based on using a q-switched Nd:YAG laser with 100 ns pulses at a wavelength of 1064 nm and an optical setup producing a photon tube. By variation of the beam divergence the shape of the photon tube can be variably modified. The optical system consists of a specially designed Galilean telescope and a focusing objective. The beam divergence can be changed in-situ by the Galilean telescope while processing. This enables to control diameter, length and angle of the photon tube. Shaped controlled structures are processed applying in-situ different optical fields which have been previously defined by simulations including aberrations and diffraction effects. As an example, the variable beam shaping resulted in through-going cylindrical bores as well as such ones with a defined conical inlet with respect to its taper angle and depth. Taper angles between 1 and nearly 50 degrees were realized by varying both the beam divergence and laser power. Furthermore, the variable beam shaping leads to improved and almost debris-free machining efficiency.

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Andreas Stephen, Simeon Metev, Werner Jüptner, and Frank Vollertsen "Laser-induced generation of shaped holes by variable beam shaping", Proc. SPIE 6157, Workshop on Laser Applications in Europe, 61570I (9 December 2005); https://doi.org/10.1117/12.661207

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KEYWORDS

Beam shaping

Telescopes

Diffraction

Device simulation

Geometrical optics

Laser beam propagation

Gaussian beams

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