Silicon and polymer nanophotonic devices based on photonic crystals

Wei Jiang; Yongqiang Jiang; Lanlan Gu; Li Wang; Xiaonan Chen; Ray T. Chen

doi:10.1117/12.674116

3 March 2006 Silicon and polymer nanophotonic devices based on photonic crystals

Wei Jiang, Yongqiang Jiang, Lanlan Gu, Li Wang, Xiaonan Chen, Ray T. Chen

Proceedings Volume 6124, Optoelectronic Integrated Circuits VIII; 612410 (2006) https://doi.org/10.1117/12.674116
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

Photonic crystals (PhCs) provide a promising nanophotonic platform for developing novel optoelectronic devices with significantly reduced device size and power consumption. Silicon nanophotonics is anticipated to play a pivotal role in the future nano-system integration owing to the maturity of sub-micron silicon complementary metal oxide semiconductor (CMOS) technology. An ultra-compact silicon modulator was experimentally demonstrated based on silicon photonic crystal waveguides. Modulation operation was achieved by carrier injection into an 80-micron-long silicon PhC waveguide of a Mach-Zehnder interferometer (MZI) structure. The driving current to obtain a phase shift of pi across the active region was as low as 0.15 mA, owing to slow light group velocity in PhC waveguides. The modulation depth was 92%. The electrode between the two waveguide arms of the MZI structure was routed to the space outside the MZI. In real devices, this planarized routing design would be essential to integrating the silicon modulator with electrical driving circuitry on a single silicon chip. For laboratory test, this routing scheme also eliminated the need of placing a bulky pad between the two arms and gave our modulator a distinctive slim profile and a much smaller footprint. Polymeric photonic crystals were designed for superprism based laser beam steering applications, and were fabricated by nano-imprint and other techniques.

Citation Download Citation

Wei Jiang, Yongqiang Jiang, Lanlan Gu, Li Wang, Xiaonan Chen, and Ray T. Chen "Silicon and polymer nanophotonic devices based on photonic crystals", Proc. SPIE 6124, Optoelectronic Integrated Circuits VIII, 612410 (3 March 2006); https://doi.org/10.1117/12.674116

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