Physical vapor transport crystal growth of ZnO

J. Carlos Rojo; Shanshan Liang; Hui Chen; Michael Dudley

doi:10.1117/12.656322

2 March 2006 Physical vapor transport crystal growth of ZnO

J. Carlos Rojo, Shanshan Liang, Hui Chen, Michael Dudley

Proceedings Volume 6122, Zinc Oxide Materials and Devices; 61220Q (2006) https://doi.org/10.1117/12.656322
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

Physical vapor transport (PVT) growth of mm-size, polycrystalline ZnO has been demonstrated at temperatures exceeding 1600°C under air at atmospheric pressure. Scanning electron microscopy (SEM) analysis revealed the growth of grains and microcrystals with strong faceted morphologies suggesting near-equilibrium growth conditions. In addition, a temperature-dependent formula for the O₂ sticking coefficient has been developed to predict the maximum growth rate of PVT ZnO. Combining this formula with an existing one-dimensional analytical model for PVT growth of bulk AlN, the value of the growth rate of PVT ZnO as a function of temperature and oxygen vapor partial pressure has been studied. This analysis predicts that growth rates in the order of 1mm/h could be theoretically achieved using the PVT method under non-stoichiometric oxygen-rich vapor pressures and temperatures exceeding 1600°C.

Citation Download Citation

J. Carlos Rojo, Shanshan Liang, Hui Chen, and Michael Dudley "Physical vapor transport crystal growth of ZnO", Proc. SPIE 6122, Zinc Oxide Materials and Devices, 61220Q (2 March 2006); https://doi.org/10.1117/12.656322

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available