Progress in development on CdZnTe x-ray detector

Yongdong Zhou; Ning Zhou; Linhu Zhang; Jin Wang; Aihua Wan

doi:10.1117/12.647265

23 February 2006 Progress in development on CdZnTe x-ray detector

Yongdong Zhou, Ning Zhou, Linhu Zhang, Jin Wang, Aihua Wan

Proceedings Volume 6119, Semiconductor Photodetectors III; 61190H (2006) https://doi.org/10.1117/12.647265
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

X-ray Photoelectron Spectroscope (XPS) was applied to investigate the fresh surface of CdTe crystal surface, prepared by traditional bromine methanol acid etching process. A thin layer of tellurium precipitate had been discovered covering the etched CdTe surface, which is very harmful for the final X-ray detector performance. A special kind of solution had been developed to remove this tellurium precipitates layer for a real fresh CdTe based crystal surface achievement. Further XPS experimental results confirmed that by the application of this solution, the surface tellurium precipitate had been eliminated. Traditional photolithograph process had been employed to fabricate X-ray two-dimensional detector arrays on the tellurium precipitate free CdZnTe surface. Various kinds of two-dimensional CdZnTe X-ray detector arrays, such as 3×3, 4×4 and 32×32 arrays had been fabricated. 10μm width guard rings are precisely achieved for some detector elements. The high-resolution microscope inspection proves that the pattern precision of 0.1μm is achieved on CdZnTe bulk crystal surface. Edge effecting of the photolithograph has been eliminated.

Citation Download Citation

Yongdong Zhou, Ning Zhou, Linhu Zhang, Jin Wang, and Aihua Wan "Progress in development on CdZnTe x-ray detector", Proc. SPIE 6119, Semiconductor Photodetectors III, 61190H (23 February 2006); https://doi.org/10.1117/12.647265

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