A new deformable mirror for adaptive optics

R. Rousier; C. Divoux; H. Grange; J. Charton; M. H. Vaudaine; L. Jocou; N. Raphoz; M. Trzmiel; C. Pisella; C. Chappaz

doi:10.1117/12.651659

23 January 2006 A new deformable mirror for adaptive optics

R. Rousier, C. Divoux, H. Grange, J. Charton, M. H. Vaudaine, L. Jocou, N. Raphoz, M. Trzmiel, C. Pisella, C. Chappaz

Proceedings Volume 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV; 61140K (2006) https://doi.org/10.1117/12.651659
Event: MOEMS-MEMS 2006 Micro and Nanofabrication, 2006, San Jose, California, United States

Abstract

We present here a deformable mirror (DM) with a continuous mirror using new zipping actuators, compatible with a simplified collective process and electronic integration. The originality of these new zipping actuators is the presence of a rotation support and a lever to push the mirror. Therefore a small electrostatic gap is enough to obtain large strokes. The device is a bi-directional electrostatic actuator with two other adjacent levers which pull the mirror down. The mirrors are silicon reflective membranes obtained with SOI wafers to bring flexibility in the mechanical design, as well as superior mirror flatness and surface roughness. Using finite element analysis (FEA), simulations is being performed so as to evaluate the performance of the actuators. The recent simulations have shown that the actuator design should enable inter-actuator strokes larger than 1 μm. A first device has been realised to show the feasibility. It is DMs with 19 actuators and a mirror of 1 cm in diameter. Experimentally observed actuator strokes of more than 4.5 μm were obtained for an applied voltage of 60 V when the mirror was pulled down and the first promising results were obtained when the mirror was pushed up from 10 V to 80 V. The specific shape of the links between the membrane and the actuators provides remarkable optical properties. The optical print-through due to the pillar architecture has been reduced to 1.5 nm RMS, which is close to the mirror roughness.

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R. Rousier, C. Divoux, H. Grange, J. Charton, M. H. Vaudaine, L. Jocou, N. Raphoz, M. Trzmiel, C. Pisella, and C. Chappaz "A new deformable mirror for adaptive optics", Proc. SPIE 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV, 61140K (23 January 2006); https://doi.org/10.1117/12.651659

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KEYWORDS

Actuators

Mirrors

Silicon

Electrodes

Deformable mirrors

Dielectrics

Semiconducting wafers

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