Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

Euan Ramsay; Nicholas Pleynet; Dong Xiao; Richard J. Warburton; Derryck T. Reid

doi:10.1117/12.645629

28 February 2006 Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method

Euan Ramsay, Nicholas Pleynet, Dong Xiao, Richard J. Warburton, Derryck T. Reid

Author Affiliations +

Proceedings Volume 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI; 61080G (2006) https://doi.org/10.1117/12.645629
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

This paper reports the imaging of a silicon flip-chip with high resolution by detection of the photocurrent generated by the two-photon absorption of 1530nm light from a femtosecond Er:fiber laser. High resolution imaging was made possible by the inclusion of a silicon solid immersion lens, which increased the numerical aperture of the microscope. Using this technique, features on a sub-micron scale are clearly resolvable with excellent contrast, and the resolution of the system was found to be 325nm.

Citation Download Citation

Euan Ramsay, Nicholas Pleynet, Dong Xiao, Richard J. Warburton, and Derryck T. Reid "Silicon flip-chip imaging with a resolution of 325-nm using solid-immersion lenses and the two-photon optical-beam induced current method", Proc. SPIE 6108, Commercial and Biomedical Applications of Ultrafast Lasers VI, 61080G (28 February 2006); https://doi.org/10.1117/12.645629

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available