Paper
1 March 2006 Pulsed selective laser removal of nano- and micro-particles
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Abstract
Selective laser removal of micro-particles of one chemical composition from their mixture with micro-particles of another chemical type pre-deposited on hydrophobic or hydrophilic surfaces have been demonstrated by means of steam laser cleaning method realized with nanosecond IR laser and various liquid energy transfer media (ETM). Microscopic imaging of particle mixture deposition, ETM dosing and final particle removal has been performed with the help of timeresolved optical microscopy. Optimal ETM/particle combinations for selective targeting and removal of specific particles from their mixture on the surfaces have been revealed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shishir Shukla, Sergey I. Kudryashov, Kevin Lyon, and Susan D. Allen "Pulsed selective laser removal of nano- and micro-particles", Proc. SPIE 6107, Laser-based Micropackaging, 61070S (1 March 2006); https://doi.org/10.1117/12.647056
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KEYWORDS
Particles

Silicon

Gas lasers

Stanford Linear Collider

Microscopes

Pulsed laser operation

Carbon monoxide

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