Polyimide amplified piezoelectric scanner for endoscopic optical coherence tomography

Jason M. Zara; Paul E. Patterson

doi:10.1117/12.648761

20 February 2006 Polyimide amplified piezoelectric scanner for endoscopic optical coherence tomography

Jason M. Zara, Paul E. Patterson

Proceedings Volume 6079, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine X; 60791K (2006) https://doi.org/10.1117/12.648761
Event: SPIE BiOS, 2006, San Jose, California, United States

Abstract

We have modeled, fabricated, and tested polyimide amplified piezoelectric bimorph scanning mirrors for application in optical coherence tomography (OCT). These scanning mirrors are fabricated using photolithography using polyimide as a substrate. These devices use bimorph actuators to drive polyimide micromechanical structures at resonance. The forced vibration of these micromechanical structures causes polysilicon gold plated mirrors attached to two torsion hinges to tilt. Operating the device at resonance allows us to achieve very large displacements of the mirror at real-time imaging speeds. The large scan angles and fast imaging speeds give these novel scanning devices the potential to be used to image larger areas of tissue to search for diseases such as mucosal cancers and to guide interventional procedures such as laser ablations and biopsies in real time. The mirror and support structures were modeled using one-dimensional beam theory and fundamental vibration mechanics. The structures were also modeled and simulated using ANSYS, a finite element analysis package. The finite element modeling has also lead to the development of new methods to fabricate the entire devices on a single silicon wafer. Prototype scanning devices have demonstrated optical scan angles up to 97 degrees with applied voltages from 15-60 V at a resonant frequencies ranging from 12-60 Hz, appropriate for real time imaging. These amplified bimorph imaging probes have been integrated into the scanning arm of a Spectral Domain OCT (SD-OCT) imaging system and have been used to generate preliminary in vivo human skin images at frame rates of 25 frames per second.

Citation Download Citation

Jason M. Zara and Paul E. Patterson "Polyimide amplified piezoelectric scanner for endoscopic optical coherence tomography", Proc. SPIE 6079, Coherence Domain Optical Methods and Optical Coherence Tomography in Biomedicine X, 60791K (20 February 2006); https://doi.org/10.1117/12.648761

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