A new method for calculating the microstructural stiffness of MEMS devices

Yu Liu; Zhiyu Wen; Liuqiang Zhang; Yuqian Liang

doi:10.1117/12.664132

21 March 2006 A new method for calculating the microstructural stiffness of MEMS devices

Yu Liu, Zhiyu Wen, Liuqiang Zhang, Yuqian Liang

Proceedings Volume 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials; 604005 (2006) https://doi.org/10.1117/12.664132
Event: ICMIT 2005: Merchatronics, MEMS, and Smart Materials, 2005, Chongqing, China

Abstract

The stiffness of microstructures is an important parameter for MEMS devices. This parameter is usually obtained by using a FEM approach, from which it is difficult to obtain an analytical expression. A microaccelerometer with a complex microstructure was designed in the present study. Its main-axial stiffness was calculated by a force method and energy method. The theoretical results are consistent with that of the FEM approach. After applying this method to the stiffness analysis of other MEMS devices, such as a micromirror, symmetric four-beam structure, and a typical combfinger capacitive microaccelerometer, it can be concluded that this methodology is applicable to the stiffness analysis of symmetric and statically indeterminate microstructures.

Citation Download Citation

Yu Liu, Zhiyu Wen, Liuqiang Zhang, and Yuqian Liang "A new method for calculating the microstructural stiffness of MEMS devices", Proc. SPIE 6040, ICMIT 2005: Mechatronics, MEMS, and Smart Materials, 604005 (21 March 2006); https://doi.org/10.1117/12.664132

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