Self-assembly micro optical filter

Ping Zhang; Kevin Le; Smitha Malalur-Nagaraja-Rao; Lun-Chen Hsu; J.-C. Chiao

doi:10.1117/12.638604

18 January 2006 Self-assembly micro optical filter

Ping Zhang, Kevin Le, Smitha Malalur-Nagaraja-Rao, Lun-Chen Hsu, J.-C. Chiao

Proceedings Volume 6038, Photonics: Design, Technology, and Packaging II; 603820 (2006) https://doi.org/10.1117/12.638604
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

Optical communication and sensor industry face critical challenges in manufacturing for system integration. Due to the assembly complexity and integration platform variety, micro optical components require costly alignment and assembly procedures, in which many required manual efforts. Consequently, self-assembly device architectures have become a great interest and could provide major advantages over the conventional optical devices. In this paper, we discussed a self-assembly integration platform for micro optical components. To demonstrate the adaptability and flexibility of the proposed optical device architectures, we chose a commercially available MEMS fabrication foundry service - MUMPs (Multi-User MEMS Process). In this work, polysilicon layers of MUMPS are used as the 3-D structural material for construction of micro component framework and actuators. However, because the polysilicon has high absorption in the visible and near infrared wavelength ranges, it is not suitable for optical interaction. To demonstrate the required optical performance, hybrid integration of materials was proposed and implemented. Organic compound materials were applied on the silicon-based framework to form the required optical interfaces. Organic compounds provide good optical transparency, flexibility to form filters or lens and inexpensive manufacturing procedures. In this paper, we have demonstrated a micro optical filter integrated with self-assembly structures. We will discuss the self-assembly mechanism, optical filter designs, fabrication issues and results.

Citation Download Citation

Ping Zhang, Kevin Le, Smitha Malalur-Nagaraja-Rao, Lun-Chen Hsu, and J.-C. Chiao "Self-assembly micro optical filter", Proc. SPIE 6038, Photonics: Design, Technology, and Packaging II, 603820 (18 January 2006); https://doi.org/10.1117/12.638604

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KEYWORDS

Polymers

Optical filters

Actuators

Microelectromechanical systems

Optics manufacturing

Optical components

Fabry–Perot interferometers

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