Polymeric electro-optical channel waveguide fabricated by lithography and wet chemical etching

Kevin Le; Ping Zhang; Hans Hu; J.-C. Chiao

doi:10.1117/12.638302

18 January 2006 Polymeric electro-optical channel waveguide fabricated by lithography and wet chemical etching

Kevin Le, Ping Zhang, Hans Hu, J.-C. Chiao

Proceedings Volume 6038, Photonics: Design, Technology, and Packaging II; 60381Q (2006) https://doi.org/10.1117/12.638302
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

Electro-optical channel waveguide is fabricated using an optical nonlinear polymer developed by doping dye organic molecules in a host polymer system and followed by an electric field poling step. A single-mode polymeric electrooptical channel waveguide is modeled using the BeamProp. Photolithography followed by wet chemical etching is used to fabricate the polymeric channel waveguide. A fabrication process is described. Results from a systematic evaluation of the film and waveguide physical and optical properties using AFM, profilometer, ellipsometer and the Maker Fringe technique is presented.

Citation Download Citation

Kevin Le, Ping Zhang, Hans Hu, and J.-C. Chiao "Polymeric electro-optical channel waveguide fabricated by lithography and wet chemical etching", Proc. SPIE 6038, Photonics: Design, Technology, and Packaging II, 60381Q (18 January 2006); https://doi.org/10.1117/12.638302

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