A low loss planar waveguide by using organic-inorganic Sol-Gel

Fu-Fei Pang; Xui-You Han; Hai-Wen Cai; Rong-Hui Qu; Zu-Jie Fang

doi:10.1117/12.667073

28 January 2006 A low loss planar waveguide by using organic-inorganic Sol-Gel

Fu-Fei Pang, Xui-You Han, Hai-Wen Cai, Rong-Hui Qu, Zu-Jie Fang

Proceedings Volume 6025, ICO20: Optical Communication; 60251O (2006) https://doi.org/10.1117/12.667073
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate(Teos) and phenyltriethoxysilane(Phtes) as precursors was synthesized, and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib waveguide was formed by inductively coupled plasma (ICP). A relation between refractive index and composition of the precursors was obtained by M-line method; the optical loss of the planar waveguide was measured to be 0.23dB/cm at 632.8nm wavelength. A directional coupler was also realized.

Citation Download Citation

Fu-Fei Pang, Xui-You Han, Hai-Wen Cai, Rong-Hui Qu, and Zu-Jie Fang "A low loss planar waveguide by using organic-inorganic Sol-Gel", Proc. SPIE 6025, ICO20: Optical Communication, 60251O (28 January 2006); https://doi.org/10.1117/12.667073

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