First 65nm tape-out using inverse lithography technology (ILT)

Chi-Yuan Hung; Bin Zhang; Deming Tang; Eric Guo; Linyong Pang; Yong Liu; Andrew Moore; Kechang Wang

doi:10.1117/12.632415

5 November 2005 First 65nm tape-out using inverse lithography technology (ILT)

Chi-Yuan Hung, Bin Zhang, Deming Tang, Eric Guo, Linyong Pang, Yong Liu, Andrew Moore, Kechang Wang

Proceedings Volume 5992, 25th Annual BACUS Symposium on Photomask Technology; 59921U (2005) https://doi.org/10.1117/12.632415
Event: SPIE Photomask Technology, 2005, Monterey, California, United States

Abstract

This paper presents SMIC's first 65nm tape out results, in particularly, using ILT. ILT mathematically determines the mask features that produce the desired on-wafer results with best wafer pattern fidelity, largest process window or both. SMIC applied it to its first 65nm tape-out to study ILT performance and benefits for deep sub-wavelength lithography. SMIC selected 3 SRAM designs as the first test case, because SRAM bit-cells contain features which are challenging lithographically. Mask patterns generated from both conventional OPC and ILT were placed on the mask side-by-side. Mask manufacturability (including fracturing, writing time, inspection, and metrology) and wafer print performance of ILT were studied. The results demonstrated that ILT achieved better CD accuracy, produced substantially larger process window than conventional OPC, and met SMIC's 65nm process window requirements.

Citation Download Citation

Chi-Yuan Hung, Bin Zhang, Deming Tang, Eric Guo, Linyong Pang, Yong Liu, Andrew Moore, and Kechang Wang "First 65nm tape-out using inverse lithography technology (ILT)", Proc. SPIE 5992, 25th Annual BACUS Symposium on Photomask Technology, 59921U (5 November 2005); https://doi.org/10.1117/12.632415

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available