Paper
7 June 2005 Effect of laser ablation parameters on the structure and properties of multicomponent magnetic films
A. Luches, S. Luby, S. Acquaviva, A. P. Caricato, M. Fernandez, E. Majkova, Z. Frait, D. Fraitova, R. Malych, P. Mengucci
Author Affiliations +
Proceedings Volume 5850, Advanced Laser Technologies 2004; (2005) https://doi.org/10.1117/12.633523
Event: Advanced Laser Technologies 2004, 2004, Rome and Frascati, Italy
Abstract
Co and Fe-based alloy films were deposited and studied as perspective materials for the development of fast magnetic sensors. Pulsed laser ablation deposition (PLD) was used as an appropriate technique to fabricate thin films preserving the stoichiomeUy ofthe complex bulk materials. Co67Cr7Fe4SiB14, Fe75Nb3Cu1Si12B9, Fe40Ni40B20 and FexNi1-x (x=22, 36, 50) amorphous ribbons and metallic foils were ablated to deposit 10-120 nm thick films onto oxidized Si wafers using a KrF (λ= 248 urn) laser with 30 ns pulses at fluence from 2 to 7 Jcm-2. The films were analyzed by scanning electron microscopy (SEM), energy dispersion spectroscopy (EDS), Rutherford backscattering spewometiy (RBS), x-ray diffraction (XRD) and reflectivity (XRR), and ferromagnetic resonance (FMR). The structural and magnetic characteristics of the films strongly depend on the laser fluence. Stoichiometry is well preserved at low laser fluences. At higher fluences lighter elements (Si, B) are partly lost. Unwanted crystallization of films is also observed at the high fluence. Magnetic characteristics are closely related to the corresponding source materials, unless the light elements are partly lost. When this happens increased magnetization of film is observed. The relaxation process in films was characterized by FMR linewidth. They are typically very narrow (110-250 G) for Fe-based alloys, indicating low values of magnetization motion damping (down to 6.06x107 radius) and therefore pointing to a perspective use of these materials for fast sensors.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. Luches, S. Luby, S. Acquaviva, A. P. Caricato, M. Fernandez, E. Majkova, Z. Frait, D. Fraitova, R. Malych, and P. Mengucci "Effect of laser ablation parameters on the structure and properties of multicomponent magnetic films", Proc. SPIE 5850, Advanced Laser Technologies 2004, (7 June 2005); https://doi.org/10.1117/12.633523
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KEYWORDS
Magnetism

Iron

Laser ablation

Silicon

Thin films

Scanning electron microscopy

Crystals

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