Growth of anatase TiO2 thin films by laser ablation

Nadya E. Stankova; Petar A. Atanasov; Anna O. Dikovska; Ivan G. Dimitrov; Gabriel Socol; Ion N. Mihailescu

doi:10.1117/12.617327

22 April 2005 Growth of anatase TiO₂ thin films by laser ablation

Nadya E. Stankova, Petar A. Atanasov, Anna O. Dikovska, Ivan G. Dimitrov, Gabriel Socol, Ion N. Mihailescu

Proceedings Volume 5830, 13th International School on Quantum Electronics: Laser Physics and Applications; (2005) https://doi.org/10.1117/12.617327
Event: 13th International School on Quantum Electronics: Laser Physics and Applications, 2004, Bourgas, Bulgaria

Abstract

Thin TiO₂ films were grown on (001) SiO₂ substrates using excimer KrF laser ablation of ceramic targets. The influence of deposition temperatures at fixed oxygen pressure of 10 Pa on the crystal and optical properties of the films was investigated. Structural characterisation by X-ray diffraction and Raman spectroscopy shows preferential crystallization of the anatase TiO₂ films were obtained at high temperatures of 500 and 600 °C, respectively. Optical transmission as high as 92% in the visible spectral region was measured for films grown at temperatures higher than 400 °C. The refractive index and the thickness of the films measured by m-line spectroscopy shows the highest values of 2/41 and 250 nm, respectively, at deposition temperature of 600 °C.

Citation Download Citation

Nadya E. Stankova, Petar A. Atanasov, Anna O. Dikovska, Ivan G. Dimitrov, Gabriel Socol, and Ion N. Mihailescu "Growth of anatase TiO₂ thin films by laser ablation", Proc. SPIE 5830, 13th International School on Quantum Electronics: Laser Physics and Applications, (22 April 2005); https://doi.org/10.1117/12.617327

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