Two-dimensional photonic crystals: fabrication of the periodic arrays by visible light holographic technique

Rafal Dylewicz; Jaroslaw Mysliwiec; Sergiusz Patela; Andrzej Miniewicz

doi:10.1117/12.610644

23 February 2005 Two-dimensional photonic crystals: fabrication of the periodic arrays by visible light holographic technique

Rafal Dylewicz, Jaroslaw Mysliwiec, Sergiusz Patela, Andrzej Miniewicz

Author Affiliations +

Proceedings Volume 5775, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments III; (2005) https://doi.org/10.1117/12.610644
Event: Wilga 2004, 2004, Wilga, Poland

Abstract

Application of photonic crystals in the future photonic integrated circuits (PICs) is one of the most interesting issues in modern photonics. With the photonic-crystal-based PICs it will be possible, at last, to realize compact in size, multicomponent optical integrated circuits. Nanostructured materials with ordered arrays of holes or rods are practical realization of photonic band-gap concept. In this paper we present a fabrication method for periodic arrays with openings of arbitrary shape and size. The method is based on exposition of thin photoresist film with two interfering laser beams 3^rd harmonics of Nd-YAG laser source and positive photoresist has been used. Two examples of periodic structures are described here: obtained with 75° and 90° substrate rotation. In both cases the starting structure was one-dimensional diffraction grating with period of 1.26 μm. Two different patterns has been obtained in photoresist as a result of the test exposures. In one case nearly circular openings with diameter of 780 nm has been obtained. Periodicity of the resulting array, grid pattern, shape and size of the openings can be varied by adjustment of exposure parameters which can lead to fabrication of two-dimensional photonic crystal.

Citation Download Citation

Rafal Dylewicz, Jaroslaw Mysliwiec, Sergiusz Patela, and Andrzej Miniewicz "Two-dimensional photonic crystals: fabrication of the periodic arrays by visible light holographic technique", Proc. SPIE 5775, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments III, (23 February 2005); https://doi.org/10.1117/12.610644

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available