The effects of ion cleaning on the roughness of substrates and laser induced damage thresholds of films

Dawei Zhang; Jianda Shao; Shuhai Fan; Yuanan Zhao; Ruiying Fan; Yingjian Wang; Zhengxiu Fan

doi:10.1117/12.608005

8 December 2004 The effects of ion cleaning on the roughness of substrates and laser-induced damage thresholds of films

Dawei Zhang, Jianda Shao, Shuhai Fan, Yuanan Zhao, Ruiying Fan, Yingjian Wang, Zhengxiu Fan

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.608005
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

The ion cleaning effect on the roughness of substrates and laser induced damage thresholds (LIDT) of films were investigated. It is found that ion cleaning has different effects on the roughness of substrates with the different ion cleaning time, and it improves the LIDT of single layer films greatly.

Citation Download Citation

Dawei Zhang, Jianda Shao, Shuhai Fan, Yuanan Zhao, Ruiying Fan, Yingjian Wang, and Zhengxiu Fan "The effects of ion cleaning on the roughness of substrates and laser-induced damage thresholds of films", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.608005

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