Optical properties of Al2O3 and MgF2 coatings deposited by electron-beam evaporation in the DUV/VUV spectral range

Shuzhen Shang; Kui Yi; Jianbing Huang; Jianda Shao; Zhengxiu Fan

doi:10.1117/12.608036

8 December 2004 Optical properties of Al₂O₃ and MgF₂ coatings deposited by electron-beam evaporation in the DUV/VUV spectral range

Shuzhen Shang, Kui Yi, Jianbing Huang, Jianda Shao, Zhengxiu Fan

Author Affiliations +

Proceedings Volume 5774, Fifth International Conference on Thin Film Physics and Applications; (2004) https://doi.org/10.1117/12.608036
Event: Fifth International Conference on Thin Film Physics and Applications, 2004, Shanghai, China

Abstract

Single layers of Al₂O₃ and MgF₂ were deposited upon super polished fused-silica by electron-beam evaporation and were characterized. The subsequent optical constants n and k were reported for the spectral range of 180nm-230nm. And HR coatings for 193nm were designed on the basis of the evaluated optical constants and produced. Transmittance and reflectance of HR coatings were compared to the theoretical calculations on the basis of the evaluated optical constants of the single layers.

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Shuzhen Shang, Kui Yi, Jianbing Huang, Jianda Shao, and Zhengxiu Fan "Optical properties of Al₂O₃ and MgF₂ coatings deposited by electron-beam evaporation in the DUV/VUV spectral range", Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, (8 December 2004); https://doi.org/10.1117/12.608036

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