Block-copolymerized polyimides for optical waveguides

Taro Itatani; Sucheta Gorwadkar; Akinori Shiotani; Masahiro Igusa; Kenji Yonei; Joji Maeda; Hiroshi Itatani

doi:10.1117/12.600190

4 May 2005 Block-copolymerized polyimides for optical waveguides

Taro Itatani, Sucheta Gorwadkar, Akinori Shiotani, Masahiro Igusa, Kenji Yonei, Joji Maeda, Hiroshi Itatani

Proceedings Volume 5753, Advances in Resist Technology and Processing XXII; (2005) https://doi.org/10.1117/12.600190
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

We have developed polyimides for optical waveguide synthesized by block-copolymerization method. We demonstrated the optical waveguide with rather low refractive indices. Lower refractive indices make larger waveguide size and easier coupling to optical fibers. We applied polyimides with lower refractive indices with a fluorinated polyimide for the clad and polyimide of dedrimer structures for core. The refractive indices are precisely controlled as 0.01 by thermal conditions. This core polyimide has patterned by i-line process and formed optical waveguide.

Citation Download Citation

Taro Itatani, Sucheta Gorwadkar, Akinori Shiotani, Masahiro Igusa, Kenji Yonei, Joji Maeda, and Hiroshi Itatani "Block-copolymerized polyimides for optical waveguides", Proc. SPIE 5753, Advances in Resist Technology and Processing XXII, (4 May 2005); https://doi.org/10.1117/12.600190

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