Paper
1 April 2005 Terahertz quantum cascade lasers with metal-metal waveguides
Benjamin S. Williams, Stephen Kohen, Sushil Kumar, Qing Hu, John L. Reno
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Abstract
Quantum cascade lasers that operate in the underdeveloped terahertz spectral range (1-10 THz) promise to contribute to applications in sensing, spectroscopy, and imaging. We describe our development of terahertz quantum cascade lasers based on the resonant-phonon depopulation concept and that use low-loss metal-metal waveguides for optical confinement. Two- and three-dimensional finite-element simulations of terahertz metal-metal waveguides are used to demonstrate their high modal confinement even for very narrow ridges. Also, simulations predict high facet reflectivities due to the modal impedance mismatch with free space at the sub-wavelength waveguide aperture of these metal-metal waveguides. Finally, we report the demonstration of a 2.8 THz laser that operates up to 97 K in continuous-wave mode fabricated using a Cu-Cu thermocompression bonding technique.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Benjamin S. Williams, Stephen Kohen, Sushil Kumar, Qing Hu, and John L. Reno "Terahertz quantum cascade lasers with metal-metal waveguides", Proc. SPIE 5738, Novel In-Plane Semiconductor Lasers IV, (1 April 2005); https://doi.org/10.1117/12.597122
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Cited by 1 scholarly publication.
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KEYWORDS
Waveguides

Terahertz radiation

Quantum cascade lasers

Reflectivity

Wafer bonding

Metals

Semiconducting wafers

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