Paper
28 April 2005 Advanced process and device modeling of full-frame CCD imagers (Invited Paper)
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Abstract
Using Synopsys TCAD tools, several examples of advanced process and device modeling are presented for full-frame CCD image sensors. The topics covered in these examples include channel potential, charge capacity, charge transport, and charge blooming. The simulations provide in depth analysis of the basic principles of operation of CCDs and cover some aspects of antiblooming protection.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Carl J. Wordelman and Edmund K. Banghart "Advanced process and device modeling of full-frame CCD imagers (Invited Paper)", Proc. SPIE 5722, Physics and Simulation of Optoelectronic Devices XIII, (28 April 2005); https://doi.org/10.1117/12.591143
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KEYWORDS
Charge-coupled devices

Electrons

Process modeling

Instrument modeling

3D modeling

TCAD

Imaging systems

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