Optical and electrical properties of In[sub]2[/sub]0[sub]2[/sub]/In, In[sub]2[/sub]0[sub]3[/sub]/Sn (ITO), In[sub]2[/sub]0[sub]3[/sub]/Cd

Chen Lixin; Zhuang Guorung; Mei Liangom

doi:10.1117/12.950684

23 February 1985 Optical and electrical properties of In₂0₂/In, In₂0₃/Sn (ITO), In₂0₃/Cd

Chen Lixin, Zhuang Guorung, Mei Liangom

Proceedings Volume 0572, Infrared Technology XI; (1985) https://doi.org/10.1117/12.950684
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

The high quality In₂0₃/Sn (ITO), In₂0₃ /In, In₂0₃/Cd have been deposited on quatz glass substrates, thermal pressed ZnS and Mgpi, substretes.Then we made transmission measurement in a rather wide range of spectrum which extends from ultraviolet through visible to middle infrared (200A--25μm), and made Hall coefficient measurement, film thickness measurement, energy spectrum analysis, X-ray diffraction, Electrolytic electroreflectance spectra measu-rement, etc. The result of which are discussed based on preliminary analysis and comparison. The square resistance of the film is in the proximity of few tx to fey ten XL. Its optical transmission in the visiblei range as high as 90% and risistivity of 101--2X104.11.-cm, free carriers concentration of 101-1041 col, free cariers mobility of 10-90cm/V.Sec are typically observed.

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Chen Lixin, Zhuang Guorung, and Mei Liangom "Optical and electrical properties of In₂0₂/In, In₂0₃/Sn (ITO), In₂0₃/Cd", Proc. SPIE 0572, Infrared Technology XI, (23 February 1985); https://doi.org/10.1117/12.950684

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KEYWORDS

Zinc

Tin

Transmittance

Cadmium

Infrared radiation

Infrared technology

Reflectivity

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