Polymer microlens array integrated with imaging sensors by UV-molding technique

Jianjun Lai; Yue Zhao; Caijun Ke; Xinjian Yi; TianXu Zhang

doi:10.1117/12.571212

17 January 2005 Polymer microlens array integrated with imaging sensors by UV-molding technique

Jianjun Lai, Yue Zhao, Caijun Ke, Xinjian Yi, TianXu Zhang

Proceedings Volume 5644, Optoelectronic Devices and Integration; (2005) https://doi.org/10.1117/12.571212
Event: Photonics Asia, 2004, Beijing, China

Abstract

Fabrication of Polymer microlens array based on UV-molding techniques is presented. UV-molding enables for the integration of polymer microlens array on top of arbitrary substrates like glass, silicon other polymeric films. In this technique, photoresist or glass mold is first fabricated by conventional photolithnic method and subsequently served as transparent replication tool. UV curable polymer resin is then coated on patterned or unpatterned substrates and a contact mask aligner is used to align substrates and replication mold tool and then make the mold immersed into the resin. Replication of polymer on substrates is achieved by UV photopolymerisation of the resin. Resin thickness and gap distance between mold and substrate are carefully controlled in order to obtain acceptable thickness of cured polymer base. The UV molding technique was used to molding of a polymer film carring microlens array on the surface of an experimental CCD imaging sensor chip in this paper to enhance its fill factor and sensitivity.

Citation Download Citation

Jianjun Lai, Yue Zhao, Caijun Ke, Xinjian Yi, and TianXu Zhang "Polymer microlens array integrated with imaging sensors by UV-molding technique", Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); https://doi.org/10.1117/12.571212

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