Nanostructure generation based on laser cooling and mechanical mask

Xian Zhong Chen; Ting Wen Xing; Jian Ping Shi; Xu Nan Chen; Han Min Yao

doi:10.1117/12.568785

9 February 2005 Nanostructure generation based on laser cooling and mechanical mask

Xian Zhong Chen, Ting Wen Xing, Jian Ping Shi, Xu Nan Chen, Han Min Yao

Proceedings Volume 5635, Nanophotonics, Nanostructure, and Nanometrology; (2005) https://doi.org/10.1117/12.568785
Event: Photonics Asia, 2004, Beijing, China

Abstract

The basic principle and the overall scheme of a new technique for nanostructure fabarication are described, and experimental results are given. A thermal atomic beam effusing out of an oven is firstly collimated by a small aperture and then collimated to a high degree by a polarization gradient laser field. This well-collimated atomic beam is patterned by a mechanical mask, and nanostructures are generated by atomic deposition. SEM profiles of nanostructures have shown that the feature size of the structure can reach nanometer scale. Compared to other micro-lithographic techniques, this technique has many advantages such as low cost, high throughput, mass production, simple process etc.

Citation Download Citation

Xian Zhong Chen, Ting Wen Xing, Jian Ping Shi, Xu Nan Chen, and Han Min Yao "Nanostructure generation based on laser cooling and mechanical mask", Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); https://doi.org/10.1117/12.568785

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