Investigation of sulfur-doped n-type diamond thin films

Qingxun Zhao; Yongjie Wang; Baoting Liu; Xiaodong Qiao; Zheng Yan; Yinshun Wang

doi:10.1117/12.573766

20 January 2005 Investigation of sulfur-doped n-type diamond thin films

Qingxun Zhao, Yongjie Wang, Baoting Liu, Xiaodong Qiao, Zheng Yan, Yinshun Wang

Proceedings Volume 5633, Advanced Materials and Devices for Sensing and Imaging II; (2005) https://doi.org/10.1117/12.573766
Event: Photonics Asia, 2004, Beijing, China

Abstract

High-quality Sulfur doped n-type diamond thin films have been successfully synthesized via glow plasma assisted hot filament chemical vapor deposition using gas mixtures of methane, hydrogen, Argon and hydrogen sulfide. Impacts of the volume ratio of hydrogen sulfide to methane R_S/Con the structural and physical properties of the films have been systematic ally studied using various techniques such as Hall effect measurement, x-ray diffraction (XRD) and atom force microscope. We found that the carrier mobility is 474 cm²V^-1S^-1 and the electrical conductivity is 1.45Ω^-1·cm^-1at R_S/C=6800ppm. The sheet resistivities of the films increase with increase of R_S/C, reach the maximum at RS/C of 6200ppm, and then begin to decrease. Also, with increase of R_S/C, a linear increase in the conductivities of the films is found, which is believed that higher R_S/Cis favorable for the increase of electrical conductivity of sulfur doped diamond thin films.

Citation Download Citation

Qingxun Zhao, Yongjie Wang, Baoting Liu, Xiaodong Qiao, Zheng Yan, and Yinshun Wang "Investigation of sulfur-doped n-type diamond thin films", Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); https://doi.org/10.1117/12.573766

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available