CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 5633 > Article
Paper
20 January 2005 Characteristic of vapor dynamic process for sulfur-doped n-type diamond films
Qingxun Zhao, Xiaodong Qiao, Yinshun Wang, Jing Zhang, Zheng Yan
Author Affiliations +
Proceedings Volume 5633, Advanced Materials and Devices for Sensing and Imaging II; (2005) https://doi.org/10.1117/12.573787
Event: Photonics Asia, 2004, Beijing, China
Abstract
Monte Carlo simulations are adopted to study the space distribution of the particles in the mixture of CH4/H2/H2S/Ar considering the avalanche collision and dissociative ionization of electrons based on the theory of glow discharge in electron-assisted chemical vapor deposition (EACVD) system. The relationship between the space distribution and the recombination rate of H and CH3, CH3+ fragment particles is given. The dynamic process of the n-type doped diamond film is simulated under different gas pressure. The particle distributions of S, S+ and Ar+ are also obtained. The result is very important for investigation of n-type diamond film doping at low temperature.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Qingxun Zhao, Xiaodong Qiao, Yinshun Wang, Jing Zhang, and Zheng Yan "Characteristic of vapor dynamic process for sulfur-doped n-type diamond films", Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); https://doi.org/10.1117/12.573787
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 5 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Diamond
Particles
Electrons
Argon
Ionization
Monte Carlo methods
Atmospheric particles
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top