Novel Characterization Of Thin Film Multilayered Structures: Microcleavage Transmission Electron Microscopy

Yves Lepetre; Ivan K. Schuller; George Rasigni; Rene Rivoira; Roger Philip; Pierre Dhez

doi:10.1117/12.949675

6 May 1985 Novel Characterization Of Thin Film Multilayered Structures: Microcleavage Transmission Electron Microscopy

Yves Lepetre, Ivan K. Schuller, George Rasigni, Rene Rivoira, Roger Philip, Pierre Dhez

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949675
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

Microcleavage Transmission Electron Microscopy has been applied to the study of many properties of multilayered samples. We illustrate the unique capabilities of this technique to study long range perpendicular thickness drifts, lateral variations, roughness, substrate quality and island structures.

Citation Download Citation

Yves Lepetre, Ivan K. Schuller, George Rasigni, Rene Rivoira, Roger Philip, and Pierre Dhez "Novel Characterization Of Thin Film Multilayered Structures: Microcleavage Transmission Electron Microscopy", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949675

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