Mechano-micro/nano systems

Mikio Horie

doi:10.1117/12.582751

25 October 2004 Mechano-micro/nano systems

Mikio Horie

Proceedings Volume 5604, Optomechatronic Micro/Nano Components, Devices, and Systems; (2004) https://doi.org/10.1117/12.582751
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

In recent years, the researches about Micro/Nano Systems are down actively in the bio-medical research fields, DNA research fields, chemical analysis systems fields, etc. In the results, a new materials and new functions in the systems are developed. In this invited paper, Mechano-Micro/Nano Systems, especially, motion systems are introduced. First, the research activities concerning the Mechano-Micro/Nano Systems in the world(MST2003, MEMS2003 and MEMS2004) and in Japan(Researech Projects on Nanotechnology and Materials in Ministry of Education, Culture, Sports, Science and Technology) are shown. Secondary, my research activities are introduced. As my research activities, (1) a comb-drive static actuator for the motion convert mechanisms, (2) a micro-nano fabrication method by use of FAB(Fast Atom Beam) machines, (3) a micro optical mirror manipulator for inputs-outputs optical switches, (4) a miniature pantograph mechanism with large-deflective hinges and links made of plastics are discussed and their performances are explained.

Citation Download Citation

Mikio Horie "Mechano-micro/nano systems", Proc. SPIE 5604, Optomechatronic Micro/Nano Components, Devices, and Systems, (25 October 2004); https://doi.org/10.1117/12.582751

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