Optical characteristics of electrochemically fabricated porous silicon microcavities

Ahmad A. Kanan; Prasanta K. Ghosh

doi:10.1117/12.571999

29 December 2004 Optical characteristics of electrochemically fabricated porous silicon microcavities

Ahmad A. Kanan, Prasanta K. Ghosh

Proceedings Volume 5593, Nanosensing: Materials and Devices; (2004) https://doi.org/10.1117/12.571999
Event: Optics East, 2004, Philadelphia, Pennsylvania, United States

Abstract

In this experiment, the optical characteristics of porous silicon microcavities (PSM) are studied using spectroscopy analysis. Porous silicon microcavities were fabricated by the anodization of boron doped P-type (111) single crystal wafers in hydrofluoric acid/ethanol (HF/EtOH) electrolytes. The samples were prepared at room temperature under different fabrication conditions in order to obtain different physical parameters such as porosity (p), thickness (d), and pore geometry. The current density was varied from 25mA/cm² to 100mA/cm² and the HF/EtOH concentration was varied from 1:1 to 1:4. The transmission spectra of the prepared samples were investigated over the range of 800 nm to 2400 nm with a period of 2 seconds. The fabricated PSM structures were investigated using SEM and their physical properties were analyzed as a function of the fabrication parameters. The transmission spectra of the prepared samples were compared to the transmission spectra of the reference bulk silicon wafer. We observed that the refractive index of the (PSM) was lower than that of bulk silicon, and it decreased with increasing porosity (p). Based on the experimental spectra of the PSM structure, we report a spectral density function relating the physical properties of the surface and the effective dielectric function.

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Ahmad A. Kanan and Prasanta K. Ghosh "Optical characteristics of electrochemically fabricated porous silicon microcavities", Proc. SPIE 5593, Nanosensing: Materials and Devices, (29 December 2004); https://doi.org/10.1117/12.571999

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KEYWORDS

Silicon

Picosecond phenomena

Semiconducting wafers

Dielectrics

Optical microcavities

Refractive index

Sensors

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