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Ultra low OH, fluorine-doped silica glasses have been successfully synthesized via sol-gel technique. The maximum relative refractive index difference to pure silica of -1.0% is obtained. Characterization of various levels of fluorine-doped silica glasses was performed by measuring vacuum ultraviolet spectra. Fluorine concentration in silica glasses strongly depends on the gel formulation, and sintering conditions. We have developed VUV/DUV transmission optical materials in various geometries, such as plates, tubes and discs. Transmission more than 80% at 157 nm is achieved with various F-doping levels silica glasses for 6.35 mm thickness.
Ken C. Cheng,Yuhuan Xu, andPeter Sheu
"Fabrication and properties of F-doped silica glasses via sol-gel technique", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.583111
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Ken C. Cheng, Yuhuan Xu, Peter Sheu, "Fabrication and properties of F-doped silica glasses via sol-gel technique," Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.583111