Determination of optical properties of titanium dioxide thin films on different substrates by using spectroscopic ellipsometry

Hyun Jong Kim; Yong Jai Cho; Hyun Mo Cho; Won Chegal; Yun Woo Lee; Sang Youl Kim

doi:10.1117/12.559427

14 October 2004 Determination of optical properties of titanium dioxide thin films on different substrates by using spectroscopic ellipsometry

Hyun Jong Kim, Yong Jai Cho, Hyun Mo Cho, Won Chegal, Yun Woo Lee, Sang Youl Kim

Author Affiliations +

Proceedings Volume 5538, Optical Constants of Materials for UV to X-Ray Wavelengths; (2004) https://doi.org/10.1117/12.559427
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We investigated the optical properties of titanium dioxide (TiO₂) thin films which were deposited by ion beam assisted deposition (IAD) method on crystalline silicon and acrylic substrates. TiO₂ thin films were grown by different growing conditions which are used the conditions of vacuum pressure, and deposition rate. The controlled vacuum pressure were 3 x 10^-5Torr and 3 x 10^-6 Torr, and the deposition rate was controlled to 0.35 nm/second, 0.20 nm/second, and 0.12 nm/second. Measurements of spectroscopic ellipsometry were performed in the spectral range between 0.76 eV and 8.7 eV with 0.02 eV steps and at the angle of incidence of 75°. We determined the complex refractive index and thickness of TiO₂ thin films using the optical model which is included the Tauc-Lorentz dispersion equation and compared the relations between the optical properties and deposition rate or vacuum pressure variation. The optical band gaps of TiO₂ thin films are around 3.42 eV.

Citation Download Citation

Hyun Jong Kim, Yong Jai Cho, Hyun Mo Cho, Won Chegal, Yun Woo Lee, and Sang Youl Kim "Determination of optical properties of titanium dioxide thin films on different substrates by using spectroscopic ellipsometry", Proc. SPIE 5538, Optical Constants of Materials for UV to X-Ray Wavelengths, (14 October 2004); https://doi.org/10.1117/12.559427

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